Strain engineering of ultra-thin silicon-on-insulator structures using ion implant

Strain engineering of ultra-thin silicon-on-insulator structures using ion implant

10.1109/ISTDM.2012.6222470

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Bibliographic Details
Main Authors: Ding, Y., Cheng, R., Zhou, Q., Du, A., Daval, N., Nguyen, B.-Y., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71873
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Institution: National University of Singapore
Description
Summary:10.1109/ISTDM.2012.6222470

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