Strain engineering of ultra-thin silicon-on-insulator structures using ion implant

10.1109/ISTDM.2012.6222470

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Bibliographic Details
Main Authors:	Ding, Y., Cheng, R., Zhou, Q., Du, A., Daval, N., Nguyen, B.-Y., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71873
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71873
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spelling	sg-nus-scholar.10635-718732015-01-12T21:51:16Z Strain engineering of ultra-thin silicon-on-insulator structures using ion implant Ding, Y. Cheng, R. Zhou, Q. Du, A. Daval, N. Nguyen, B.-Y. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ISTDM.2012.6222470 2012 International Silicon-Germanium Technology and Device Meeting, ISTDM 2012 - Proceedings 86-87 2014-06-19T03:28:48Z 2014-06-19T03:28:48Z 2012 Conference Paper Ding, Y.,Cheng, R.,Zhou, Q.,Du, A.,Daval, N.,Nguyen, B.-Y.,Yeo, Y.-C. (2012). Strain engineering of ultra-thin silicon-on-insulator structures using ion implant. 2012 International Silicon-Germanium Technology and Device Meeting, ISTDM 2012 - Proceedings : 86-87. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ISTDM.2012.6222470" target="_blank">https://doi.org/10.1109/ISTDM.2012.6222470</a> 9781457718625 http://scholarbank.nus.edu.sg/handle/10635/71873 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/ISTDM.2012.6222470
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ding, Y. Cheng, R. Zhou, Q. Du, A. Daval, N. Nguyen, B.-Y. Yeo, Y.-C.
format	Conference or Workshop Item
author	Ding, Y. Cheng, R. Zhou, Q. Du, A. Daval, N. Nguyen, B.-Y. Yeo, Y.-C.
spellingShingle	Ding, Y. Cheng, R. Zhou, Q. Du, A. Daval, N. Nguyen, B.-Y. Yeo, Y.-C. Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
author_sort	Ding, Y.
title	Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
title_short	Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
title_full	Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
title_fullStr	Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
title_full_unstemmed	Strain engineering of ultra-thin silicon-on-insulator structures using ion implant
title_sort	strain engineering of ultra-thin silicon-on-insulator structures using ion implant
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71873
_version_	1681087463010861056

Strain engineering of ultra-thin silicon-on-insulator structures using ion implant

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