Strain engineering of ultra-thin silicon-on-insulator structures using ion implant

• Main Authors: Ding, Y., Cheng, R., Zhou, Q., Du, A., Daval, N., Nguyen, B.-Y., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71873
• Institution: National University of Singapore

10.1109/ISTDM.2012.6222470