Study of process dependent reliability in SiOC dielectric interconnects and film
Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
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2014
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sg-nus-scholar.10635-718842024-11-12T22:38:20Z Study of process dependent reliability in SiOC dielectric interconnects and film Mok, T.S. Yoo, W.J. Krishnamoorthy, A. ELECTRICAL & COMPUTER ENGINEERING Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 181-184 2014-06-19T03:28:56Z 2014-06-19T03:28:56Z 2004 Conference Paper Mok, T.S.,Yoo, W.J.,Krishnamoorthy, A. (2004). Study of process dependent reliability in SiOC dielectric interconnects and film. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 181-184. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/71884 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Mok, T.S. Yoo, W.J. Krishnamoorthy, A. |
| format |
Conference or Workshop Item |
| author |
Mok, T.S. Yoo, W.J. Krishnamoorthy, A. |
| spellingShingle |
Mok, T.S. Yoo, W.J. Krishnamoorthy, A. Study of process dependent reliability in SiOC dielectric interconnects and film |
| author_sort |
Mok, T.S. |
| title |
Study of process dependent reliability in SiOC dielectric interconnects and film |
| title_short |
Study of process dependent reliability in SiOC dielectric interconnects and film |
| title_full |
Study of process dependent reliability in SiOC dielectric interconnects and film |
| title_fullStr |
Study of process dependent reliability in SiOC dielectric interconnects and film |
| title_full_unstemmed |
Study of process dependent reliability in SiOC dielectric interconnects and film |
| title_sort |
study of process dependent reliability in sioc dielectric interconnects and film |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/71884 |
| _version_ |
1821190635576623104 |