Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

IECON Proceedings (Industrial Electronics Conference)

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Main Authors: Ho, Weng Khuen, Tay, Arthur, Schaper, Charles D.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72835
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-728352015-03-30T10:07:26Z Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks Ho, Weng Khuen Tay, Arthur Schaper, Charles D. ELECTRICAL ENGINEERING IECON Proceedings (Industrial Electronics Conference) 1 17-22 IEPRE 2014-06-19T05:12:32Z 2014-06-19T05:12:32Z 1999 Conference Paper Ho, Weng Khuen,Tay, Arthur,Schaper, Charles D. (1999). Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks. IECON Proceedings (Industrial Electronics Conference) 1 : 17-22. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72835 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description IECON Proceedings (Industrial Electronics Conference)
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Ho, Weng Khuen
Tay, Arthur
Schaper, Charles D.
format Conference or Workshop Item
author Ho, Weng Khuen
Tay, Arthur
Schaper, Charles D.
spellingShingle Ho, Weng Khuen
Tay, Arthur
Schaper, Charles D.
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
author_sort Ho, Weng Khuen
title Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
title_short Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
title_full Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
title_fullStr Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
title_full_unstemmed Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
title_sort optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/72835
_version_ 1681087637963669504