Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks

IECON Proceedings (Industrial Electronics Conference)

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書目詳細資料
Main Authors:	Ho, Weng Khuen, Tay, Arthur, Schaper, Charles D.
其他作者:	ELECTRICAL ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/72835
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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