Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

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Main Authors:	Cho, Byung Jin, Kim, Sun Jung, Ling, C.H., Joo, Moon Sig, Yeo, In Seok
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72877
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72877
record_format	dspace
spelling	sg-nus-scholar.10635-728772024-11-14T01:24:42Z Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions Cho, Byung Jin Kim, Sun Jung Ling, C.H. Joo, Moon Sig Yeo, In Seok ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 30-33 00234 2014-06-19T05:12:59Z 2014-06-19T05:12:59Z 1999 Conference Paper Cho, Byung Jin,Kim, Sun Jung,Ling, C.H.,Joo, Moon Sig,Yeo, In Seok (1999). Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 30-33. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72877 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Cho, Byung Jin Kim, Sun Jung Ling, C.H. Joo, Moon Sig Yeo, In Seok
format	Conference or Workshop Item
author	Cho, Byung Jin Kim, Sun Jung Ling, C.H. Joo, Moon Sig Yeo, In Seok
spellingShingle	Cho, Byung Jin Kim, Sun Jung Ling, C.H. Joo, Moon Sig Yeo, In Seok Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
author_sort	Cho, Byung Jin
title	Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
title_short	Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
title_full	Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
title_fullStr	Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
title_full_unstemmed	Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions
title_sort	radiation-induced leakage current of ultra-thin gate oxide under x-ray lithography conditions
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72877
_version_	1821195392488833024

Radiation-induced leakage current of ultra-thin gate oxide under X-ray lithography conditions

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