$Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction$

Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors:	Toh, S.L., Li, K., Ang, C.H., Rao, R., Er, E., Loh, K.P., Boothroyd, C.B., Chan, L.
Other Authors:	CHEMISTRY
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/77440
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-77440
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spelling	sg-nus-scholar.10635-774402015-03-24T22:04:36Z Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction Toh, S.L. Li, K. Ang, C.H. Rao, R. Er, E. Loh, K.P. Boothroyd, C.B. Chan, L. CHEMISTRY Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 302-305 2014-06-23T05:55:04Z 2014-06-23T05:55:04Z 2005 Conference Paper Toh, S.L.,Li, K.,Ang, C.H.,Rao, R.,Er, E.,Loh, K.P.,Boothroyd, C.B.,Chan, L. (2005). Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 302-305. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/77440 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
author2	CHEMISTRY
author_facet	CHEMISTRY Toh, S.L. Li, K. Ang, C.H. Rao, R. Er, E. Loh, K.P. Boothroyd, C.B. Chan, L.
format	Conference or Workshop Item
author	Toh, S.L. Li, K. Ang, C.H. Rao, R. Er, E. Loh, K.P. Boothroyd, C.B. Chan, L.
spellingShingle	Toh, S.L. Li, K. Ang, C.H. Rao, R. Er, E. Loh, K.P. Boothroyd, C.B. Chan, L. Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
author_sort	Toh, S.L.
title	Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
title_short	Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
title_full	Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
title_fullStr	Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
title_full_unstemmed	Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
title_sort	evaluation of the strain state in sige/si heterostructures by high resolution x-ray diffraction and convergent beam electron diffraction
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/77440
_version_	1681088464300277760

Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction

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