Improved NiSi salicide process using presilicide N2 + implant for MOSFETs
10.1109/55.887467
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2014
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sg-nus-scholar.10635-805772024-11-13T00:36:46Z Improved NiSi salicide process using presilicide N2 + implant for MOSFETs Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Wee, A.T.S. Chan, L. ELECTRICAL ENGINEERING PHYSICS MATERIALS SCIENCE 10.1109/55.887467 IEEE Electron Device Letters 21 12 566-568 EDLED 2014-10-07T02:59:02Z 2014-10-07T02:59:02Z 2000-12 Article Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Wee, A.T.S., Chan, L. (2000-12). Improved NiSi salicide process using presilicide N2 + implant for MOSFETs. IEEE Electron Device Letters 21 (12) : 566-568. ScholarBank@NUS Repository. https://doi.org/10.1109/55.887467 07413106 http://scholarbank.nus.edu.sg/handle/10635/80577 000165684000007 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| description |
10.1109/55.887467 |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Wee, A.T.S. Chan, L. |
| format |
Article |
| author |
Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Wee, A.T.S. Chan, L. |
| spellingShingle |
Lee, P.S. Pey, K.L. Mangelinck, D. Ding, J. Wee, A.T.S. Chan, L. Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| author_sort |
Lee, P.S. |
| title |
Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| title_short |
Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| title_full |
Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| title_fullStr |
Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| title_full_unstemmed |
Improved NiSi salicide process using presilicide N2 + implant for MOSFETs |
| title_sort |
improved nisi salicide process using presilicide n2 + implant for mosfets |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80577 |
| _version_ |
1821207437080788992 |