Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation

Applied Physics Letters

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Bibliographic Details
Main Authors:	Cha, C.-L., Chor, E.-F., Gong, H., Bourdillon, A.J., Jia, Y.-M., Pan, J.-S., Zhang, A.-Q., Chan, L.
Other Authors:	MATERIALS SCIENCE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81235
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81235
record_format	dspace
spelling	sg-nus-scholar.10635-812352015-01-09T04:28:08Z Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation Cha, C.-L. Chor, E.-F. Gong, H. Bourdillon, A.J. Jia, Y.-M. Pan, J.-S. Zhang, A.-Q. Chan, L. MATERIALS SCIENCE INST OF MATERIALS RESEARCH & ENGINEERING ELECTRICAL ENGINEERING Applied Physics Letters 75 3 355-357 APPLA 2014-10-07T03:06:08Z 2014-10-07T03:06:08Z 1999-07-19 Article Cha, C.-L.,Chor, E.-F.,Gong, H.,Bourdillon, A.J.,Jia, Y.-M.,Pan, J.-S.,Zhang, A.-Q.,Chan, L. (1999-07-19). Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation. Applied Physics Letters 75 (3) : 355-357. ScholarBank@NUS Repository. 00036951 http://scholarbank.nus.edu.sg/handle/10635/81235 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Applied Physics Letters
author2	MATERIALS SCIENCE
author_facet	MATERIALS SCIENCE Cha, C.-L. Chor, E.-F. Gong, H. Bourdillon, A.J. Jia, Y.-M. Pan, J.-S. Zhang, A.-Q. Chan, L.
format	Article
author	Cha, C.-L. Chor, E.-F. Gong, H. Bourdillon, A.J. Jia, Y.-M. Pan, J.-S. Zhang, A.-Q. Chan, L.
spellingShingle	Cha, C.-L. Chor, E.-F. Gong, H. Bourdillon, A.J. Jia, Y.-M. Pan, J.-S. Zhang, A.-Q. Chan, L. Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
author_sort	Cha, C.-L.
title	Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
title_short	Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
title_full	Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
title_fullStr	Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
title_full_unstemmed	Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
title_sort	surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81235
_version_	1681089034391126016

Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation

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