Surface smoothing of floating gates in flash memory devices via surface nitrogen and carbon incorporation

• Main Authors: Cha, C.-L., Chor, E.-F., Gong, H., Bourdillon, A.J., Jia, Y.-M., Pan, J.-S., Zhang, A.-Q., Chan, L.
• Other Authors: MATERIALS SCIENCE
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81235
• Institution: National University of Singapore

Applied Physics Letters