Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation

Materials Research Society Symposium - Proceedings

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Main Authors:	Ho, C.S., Pey, K.L., Tung, C.H., Tee, K.C., Prasad, K., Saigal, D., Tan, J.J.L., Wong, H., Lee, K.H., Osipowicz, T., Chua, S.J., Karunasiri, R.P.G.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81281
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81281
record_format	dspace
spelling	sg-nus-scholar.10635-812812024-11-14T02:28:42Z Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation Ho, C.S. Pey, K.L. Tung, C.H. Tee, K.C. Prasad, K. Saigal, D. Tan, J.J.L. Wong, H. Lee, K.H. Osipowicz, T. Chua, S.J. Karunasiri, R.P.G. ELECTRICAL ENGINEERING PHYSICS Materials Research Society Symposium - Proceedings 564 109-116 MRSPD 2014-10-07T03:06:37Z 2014-10-07T03:06:37Z 1999 Article Ho, C.S.,Pey, K.L.,Tung, C.H.,Tee, K.C.,Prasad, K.,Saigal, D.,Tan, J.J.L.,Wong, H.,Lee, K.H.,Osipowicz, T.,Chua, S.J.,Karunasiri, R.P.G. (1999). Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation. Materials Research Society Symposium - Proceedings 564 : 109-116. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/81281 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ho, C.S. Pey, K.L. Tung, C.H. Tee, K.C. Prasad, K. Saigal, D. Tan, J.J.L. Wong, H. Lee, K.H. Osipowicz, T. Chua, S.J. Karunasiri, R.P.G.
format	Article
author	Ho, C.S. Pey, K.L. Tung, C.H. Tee, K.C. Prasad, K. Saigal, D. Tan, J.J.L. Wong, H. Lee, K.H. Osipowicz, T. Chua, S.J. Karunasiri, R.P.G.
spellingShingle	Ho, C.S. Pey, K.L. Tung, C.H. Tee, K.C. Prasad, K. Saigal, D. Tan, J.J.L. Wong, H. Lee, K.H. Osipowicz, T. Chua, S.J. Karunasiri, R.P.G. Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
author_sort	Ho, C.S.
title	Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
title_short	Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
title_full	Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
title_fullStr	Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
title_full_unstemmed	Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
title_sort	thermal studies on stress-induced void-like defects in epitaxial-cosi 2 formation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81281
_version_	1821194270498881536

Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation

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