Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation

Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation

Materials Research Society Symposium - Proceedings

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Bibliographic Details
Main Authors:	Ho, C.S., Pey, K.L., Tung, C.H., Tee, K.C., Prasad, K., Saigal, D., Tan, J.J.L., Wong, H., Lee, K.H., Osipowicz, T., Chua, S.J., Karunasiri, R.P.G.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81281
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Institution:	National University of Singapore

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