Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation

• Main Authors: Ho, C.S., Pey, K.L., Tung, C.H., Tee, K.C., Prasad, K., Saigal, D., Tan, J.J.L., Wong, H., Lee, K.H., Osipowicz, T., Chua, S.J., Karunasiri, R.P.G.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81281
• Institution: National University of Singapore

Materials Research Society Symposium - Proceedings