Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy
Materials Research Society Symposium - Proceedings
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2014
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sg-nus-scholar.10635-813872015-01-16T03:54:21Z Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Osipowicz, T. Ho, C.S. Chen, G.L. Chan, L. ELECTRICAL ENGINEERING PHYSICS MATERIALS SCIENCE Materials Research Society Symposium - Proceedings 591 269-275 MRSPD 2014-10-07T03:07:46Z 2014-10-07T03:07:46Z 2000 Conference Paper Lee, P.S.,Mangelinck, D.,Pey, K.L.,Ding, J.,Osipowicz, T.,Ho, C.S.,Chen, G.L.,Chan, L. (2000). Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy. Materials Research Society Symposium - Proceedings 591 : 269-275. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/81387 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium - Proceedings |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Osipowicz, T. Ho, C.S. Chen, G.L. Chan, L. |
| format |
Conference or Workshop Item |
| author |
Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Osipowicz, T. Ho, C.S. Chen, G.L. Chan, L. |
| spellingShingle |
Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Osipowicz, T. Ho, C.S. Chen, G.L. Chan, L. Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| author_sort |
Lee, P.S. |
| title |
Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| title_short |
Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| title_full |
Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| title_fullStr |
Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| title_full_unstemmed |
Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy |
| title_sort |
characterization of ni- and ni(pt)-silicide formation on narrow polycrystalline si lines by raman spectroscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81387 |
| _version_ |
1681089061978112000 |