Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy

• Main Authors: Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Osipowicz, T., Ho, C.S., Chen, G.L., Chan, L.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81387
• Institution: National University of Singapore

Materials Research Society Symposium - Proceedings