Development of wafer level packaged scanning micromirrors

10.1117/12.762021

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Bibliographic Details
Main Authors:	Yu, A., Lee, C., Yan, L.L., Zhang, Q.X., Yoon, S.U., Lau, J.H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Indium Low temperature wafer bonding MEMS Scanning micromirror Wafer level packaging
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82147
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82147
record_format	dspace
spelling	sg-nus-scholar.10635-821472024-11-09T08:00:33Z Development of wafer level packaged scanning micromirrors Yu, A. Lee, C. Yan, L.L. Zhang, Q.X. Yoon, S.U. Lau, J.H. ELECTRICAL & COMPUTER ENGINEERING Indium Low temperature wafer bonding MEMS Scanning micromirror Wafer level packaging 10.1117/12.762021 Proceedings of SPIE - The International Society for Optical Engineering 6887 - PSISD 2014-10-07T04:25:57Z 2014-10-07T04:25:57Z 2008 Article Yu, A., Lee, C., Yan, L.L., Zhang, Q.X., Yoon, S.U., Lau, J.H. (2008). Development of wafer level packaged scanning micromirrors. Proceedings of SPIE - The International Society for Optical Engineering 6887 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.762021 9780819470621 0277786X http://scholarbank.nus.edu.sg/handle/10635/82147 000255941300006 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Indium Low temperature wafer bonding MEMS Scanning micromirror Wafer level packaging
spellingShingle	Indium Low temperature wafer bonding MEMS Scanning micromirror Wafer level packaging Yu, A. Lee, C. Yan, L.L. Zhang, Q.X. Yoon, S.U. Lau, J.H. Development of wafer level packaged scanning micromirrors
description	10.1117/12.762021
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yu, A. Lee, C. Yan, L.L. Zhang, Q.X. Yoon, S.U. Lau, J.H.
format	Article
author	Yu, A. Lee, C. Yan, L.L. Zhang, Q.X. Yoon, S.U. Lau, J.H.
author_sort	Yu, A.
title	Development of wafer level packaged scanning micromirrors
title_short	Development of wafer level packaged scanning micromirrors
title_full	Development of wafer level packaged scanning micromirrors
title_fullStr	Development of wafer level packaged scanning micromirrors
title_full_unstemmed	Development of wafer level packaged scanning micromirrors
title_sort	development of wafer level packaged scanning micromirrors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82147
_version_	1821229363639615488

Development of wafer level packaged scanning micromirrors

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