Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors

10.1109/LED.2009.2010532

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Main Authors: Jiang, Y., Liow, T.Y., Singh, N., Tan, L.H., Lo, G.Q., Chan, D.S.H., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/82760
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spelling sg-nus-scholar.10635-827602023-10-30T08:02:00Z Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors Jiang, Y. Liow, T.Y. Singh, N. Tan, L.H. Lo, G.Q. Chan, D.S.H. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING Gate-all-around (GAA) silicon nanowire (SiNW) Metallic nanowire (NW) contacts Sheet resistance Ultrathin silicide film 10.1109/LED.2009.2010532 IEEE Electron Device Letters 30 2 195-197 EDLED 2014-10-07T04:33:10Z 2014-10-07T04:33:10Z 2009 Article Jiang, Y., Liow, T.Y., Singh, N., Tan, L.H., Lo, G.Q., Chan, D.S.H., Kwong, D.L. (2009). Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors. IEEE Electron Device Letters 30 (2) : 195-197. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2010532 07413106 http://scholarbank.nus.edu.sg/handle/10635/82760 000262861600031 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Gate-all-around (GAA) silicon nanowire (SiNW)
Metallic nanowire (NW) contacts
Sheet resistance
Ultrathin silicide film
spellingShingle Gate-all-around (GAA) silicon nanowire (SiNW)
Metallic nanowire (NW) contacts
Sheet resistance
Ultrathin silicide film
Jiang, Y.
Liow, T.Y.
Singh, N.
Tan, L.H.
Lo, G.Q.
Chan, D.S.H.
Kwong, D.L.
Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
description 10.1109/LED.2009.2010532
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Jiang, Y.
Liow, T.Y.
Singh, N.
Tan, L.H.
Lo, G.Q.
Chan, D.S.H.
Kwong, D.L.
format Article
author Jiang, Y.
Liow, T.Y.
Singh, N.
Tan, L.H.
Lo, G.Q.
Chan, D.S.H.
Kwong, D.L.
author_sort Jiang, Y.
title Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
title_short Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
title_full Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
title_fullStr Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
title_full_unstemmed Nickel salicided source/drain extensions for performance improvement in ultrascaled (Sub 10 nm) Si-nanowire transistors
title_sort nickel salicided source/drain extensions for performance improvement in ultrascaled (sub 10 nm) si-nanowire transistors
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82760
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