Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing

10.1109/LED.2003.812578

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Bibliographic Details
Main Authors:	Chong, Y.F., Gossmann, H.-J.L., Thompson, M.O., Pey, K.L., Wee, A.T.S., Talwar, S., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Boron penetration Laser thermal processing Poly-depletion
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82970
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82970
record_format	dspace
spelling	sg-nus-scholar.10635-829702023-10-29T20:45:06Z Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing Chong, Y.F. Gossmann, H.-J.L. Thompson, M.O. Pey, K.L. Wee, A.T.S. Talwar, S. Chan, L. ELECTRICAL & COMPUTER ENGINEERING PHYSICS Boron penetration Laser thermal processing Poly-depletion 10.1109/LED.2003.812578 IEEE Electron Device Letters 24 5 360-362 EDLED 2014-10-07T04:35:41Z 2014-10-07T04:35:41Z 2003-05 Article Chong, Y.F., Gossmann, H.-J.L., Thompson, M.O., Pey, K.L., Wee, A.T.S., Talwar, S., Chan, L. (2003-05). Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing. IEEE Electron Device Letters 24 (5) : 360-362. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2003.812578 07413106 http://scholarbank.nus.edu.sg/handle/10635/82970 000184064600025 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Boron penetration Laser thermal processing Poly-depletion
spellingShingle	Boron penetration Laser thermal processing Poly-depletion Chong, Y.F. Gossmann, H.-J.L. Thompson, M.O. Pey, K.L. Wee, A.T.S. Talwar, S. Chan, L. Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
description	10.1109/LED.2003.812578
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chong, Y.F. Gossmann, H.-J.L. Thompson, M.O. Pey, K.L. Wee, A.T.S. Talwar, S. Chan, L.
format	Article
author	Chong, Y.F. Gossmann, H.-J.L. Thompson, M.O. Pey, K.L. Wee, A.T.S. Talwar, S. Chan, L.
author_sort	Chong, Y.F.
title	Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
title_short	Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
title_full	Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
title_fullStr	Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
title_full_unstemmed	Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
title_sort	reduction of carrier depletion in p+ polysilicon gates using laser thermal processing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82970
_version_	1781784264162934784

Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing

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