Reduction of carrier depletion in p+ polysilicon gates using laser thermal processing

• Main Authors: Chong, Y.F., Gossmann, H.-J.L., Thompson, M.O., Pey, K.L., Wee, A.T.S., Talwar, S., Chan, L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Boron penetration; Laser thermal processing; Poly-depletion
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82970
• Institution: National University of Singapore

10.1109/LED.2003.812578