A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs

A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs

10.1109/VLSIT.2012.6242477

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Bibliographic Details
Main Authors: Cheng, R., Ding, Y., Koh, S.-M., Gyanathan, A., Bai, F., Liu, B., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83383
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Institution: National University of Singapore
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Summary:10.1109/VLSIT.2012.6242477

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