A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs

10.1109/VLSIT.2012.6242477

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Bibliographic Details
Main Authors:	Cheng, R., Ding, Y., Koh, S.-M., Gyanathan, A., Bai, F., Liu, B., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83383
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83383
record_format	dspace
spelling	sg-nus-scholar.10635-833832015-01-08T00:26:11Z A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs Cheng, R. Ding, Y. Koh, S.-M. Gyanathan, A. Bai, F. Liu, B. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/VLSIT.2012.6242477 Digest of Technical Papers - Symposium on VLSI Technology 93-94 DTPTE 2014-10-07T04:40:36Z 2014-10-07T04:40:36Z 2012 Conference Paper Cheng, R.,Ding, Y.,Koh, S.-M.,Gyanathan, A.,Bai, F.,Liu, B.,Yeo, Y.-C. (2012). A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs. Digest of Technical Papers - Symposium on VLSI Technology : 93-94. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/VLSIT.2012.6242477" target="_blank">https://doi.org/10.1109/VLSIT.2012.6242477</a> 9781467308458 07431562 http://scholarbank.nus.edu.sg/handle/10635/83383 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/VLSIT.2012.6242477
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Cheng, R. Ding, Y. Koh, S.-M. Gyanathan, A. Bai, F. Liu, B. Yeo, Y.-C.
format	Conference or Workshop Item
author	Cheng, R. Ding, Y. Koh, S.-M. Gyanathan, A. Bai, F. Liu, B. Yeo, Y.-C.
spellingShingle	Cheng, R. Ding, Y. Koh, S.-M. Gyanathan, A. Bai, F. Liu, B. Yeo, Y.-C. A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
author_sort	Cheng, R.
title	A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
title_short	A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
title_full	A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
title_fullStr	A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
title_full_unstemmed	A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs
title_sort	new liner stressor (gete) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel finfets
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83383
_version_	1681089425787846656

A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs

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