A new liner stressor (GeTe) featuring stress enhancement due to very large phase-change induced volume contraction for p-channel FinFETs

• Main Authors: Cheng, R., Ding, Y., Koh, S.-M., Gyanathan, A., Bai, F., Liu, B., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83383
• Institution: National University of Singapore

10.1109/VLSIT.2012.6242477