Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance

International Symposium on IC Technology, Systems and Applications

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Bibliographic Details
Main Authors:	Chua, C.S., Chor, E.F., Yu, J., Pradeep, Y., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83681
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83681
record_format	dspace
spelling	sg-nus-scholar.10635-836812015-01-09T15:41:56Z Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. ELECTRICAL & COMPUTER ENGINEERING International Symposium on IC Technology, Systems and Applications 9 461-464 2014-10-07T04:43:58Z 2014-10-07T04:43:58Z 2001 Conference Paper Chua, C.S.,Chor, E.F.,Yu, J.,Pradeep, Y.,Chan, L. (2001). Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance. International Symposium on IC Technology, Systems and Applications 9 : 461-464. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/83681 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	International Symposium on IC Technology, Systems and Applications
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L.
format	Conference or Workshop Item
author	Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L.
spellingShingle	Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
author_sort	Chua, C.S.
title	Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
title_short	Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
title_full	Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
title_fullStr	Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
title_full_unstemmed	Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
title_sort	effects of microtrenching from polysilicon gate patterning on 0.13μm mosfet device performance
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83681
_version_	1681089480661925888

Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance

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