Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance

• Main Authors: Chua, C.S., Chor, E.F., Yu, J., Pradeep, Y., Chan, L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83681
• Institution: National University of Singapore

International Symposium on IC Technology, Systems and Applications