Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance
International Symposium on IC Technology, Systems and Applications
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| التنسيق: | Conference or Workshop Item |
| منشور في: |
2014
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| الوصول للمادة أونلاين: | http://scholarbank.nus.edu.sg/handle/10635/83681 |
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| المؤسسة: | National University of Singapore |
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sg-nus-scholar.10635-836812024-11-14T00:58:08Z Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. ELECTRICAL & COMPUTER ENGINEERING International Symposium on IC Technology, Systems and Applications 9 461-464 2014-10-07T04:43:58Z 2014-10-07T04:43:58Z 2001 Conference Paper Chua, C.S.,Chor, E.F.,Yu, J.,Pradeep, Y.,Chan, L. (2001). Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance. International Symposium on IC Technology, Systems and Applications 9 : 461-464. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/83681 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
International Symposium on IC Technology, Systems and Applications |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. |
| format |
Conference or Workshop Item |
| author |
Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. |
| spellingShingle |
Chua, C.S. Chor, E.F. Yu, J. Pradeep, Y. Chan, L. Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| author_sort |
Chua, C.S. |
| title |
Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| title_short |
Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| title_full |
Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| title_fullStr |
Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| title_full_unstemmed |
Effects of microtrenching from polysilicon gate patterning on 0.13μm MOSFET device performance |
| title_sort |
effects of microtrenching from polysilicon gate patterning on 0.13μm mosfet device performance |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83681 |
| _version_ |
1821199829095677952 |