Effects of surface plasma treatment on n-GaN ohmic contact formation
10.1016/j.jcrysgro.2004.04.080
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2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83685 |
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sg-nus-scholar.10635-836852024-11-14T00:58:10Z Effects of surface plasma treatment on n-GaN ohmic contact formation Li, L.K. Tan, L.S. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING A1. Auger electron spectroscopy A1. Ohmic contacts A1. Plasma surface treatment A1. X-ray photoelectron spectroscopy B1. Gallium nitride 10.1016/j.jcrysgro.2004.04.080 Journal of Crystal Growth 268 3-4 SPEC. ISS. 499-503 JCRGA 2014-10-07T04:44:00Z 2014-10-07T04:44:00Z 2004-08-01 Conference Paper Li, L.K., Tan, L.S., Chor, E.F. (2004-08-01). Effects of surface plasma treatment on n-GaN ohmic contact formation. Journal of Crystal Growth 268 (3-4 SPEC. ISS.) : 499-503. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jcrysgro.2004.04.080 00220248 http://scholarbank.nus.edu.sg/handle/10635/83685 000223087000031 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
A1. Auger electron spectroscopy A1. Ohmic contacts A1. Plasma surface treatment A1. X-ray photoelectron spectroscopy B1. Gallium nitride |
| spellingShingle |
A1. Auger electron spectroscopy A1. Ohmic contacts A1. Plasma surface treatment A1. X-ray photoelectron spectroscopy B1. Gallium nitride Li, L.K. Tan, L.S. Chor, E.F. Effects of surface plasma treatment on n-GaN ohmic contact formation |
| description |
10.1016/j.jcrysgro.2004.04.080 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Li, L.K. Tan, L.S. Chor, E.F. |
| format |
Conference or Workshop Item |
| author |
Li, L.K. Tan, L.S. Chor, E.F. |
| author_sort |
Li, L.K. |
| title |
Effects of surface plasma treatment on n-GaN ohmic contact formation |
| title_short |
Effects of surface plasma treatment on n-GaN ohmic contact formation |
| title_full |
Effects of surface plasma treatment on n-GaN ohmic contact formation |
| title_fullStr |
Effects of surface plasma treatment on n-GaN ohmic contact formation |
| title_full_unstemmed |
Effects of surface plasma treatment on n-GaN ohmic contact formation |
| title_sort |
effects of surface plasma treatment on n-gan ohmic contact formation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83685 |
| _version_ |
1821205894692601856 |