Effects of surface plasma treatment on n-GaN ohmic contact formation

• Main Authors: Li, L.K., Tan, L.S., Chor, E.F.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: A1. Auger electron spectroscopy; A1. Ohmic contacts; A1. Plasma surface treatment; A1. X-ray photoelectron spectroscopy; B1. Gallium nitride
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83685
• Institution: National University of Singapore

10.1016/j.jcrysgro.2004.04.080