Effects of surface plasma treatment on n-GaN ohmic contact formation

Effects of surface plasma treatment on n-GaN ohmic contact formation

10.1016/j.jcrysgro.2004.04.080

Saved in:
Bibliographic Details
Main Authors: Li, L.K., Tan, L.S., Chor, E.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
A1. Auger electron spectroscopy
A1. Ohmic contacts
A1. Plasma surface treatment
A1. X-ray photoelectron spectroscopy
B1. Gallium nitride
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83685
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83685

Similar Items