Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack

10.1016/S0167-9317(01)00592-5

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Bibliographic Details
Main Authors:	Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Layer inversion LPCVD Ni silicidation Ni(Pt)Si RTCVD
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83704
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83704
record_format	dspace
spelling	sg-nus-scholar.10635-837042023-10-25T20:08:35Z Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. See, A. ELECTRICAL & COMPUTER ENGINEERING PHYSICS MATERIALS SCIENCE Layer inversion LPCVD Ni silicidation Ni(Pt)Si RTCVD 10.1016/S0167-9317(01)00592-5 Microelectronic Engineering 60 1-2 171-181 MIENE 2014-10-07T04:44:14Z 2014-10-07T04:44:14Z 2002-01 Conference Paper Lee, P.S., Mangelinck, D., Pey, K.L., Ding, J., Chi, D.Z., Osipowicz, T., Dai, J.Y., See, A. (2002-01). Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack. Microelectronic Engineering 60 (1-2) : 171-181. ScholarBank@NUS Repository. https://doi.org/10.1016/S0167-9317(01)00592-5 01679317 http://scholarbank.nus.edu.sg/handle/10635/83704 000173194900020 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Layer inversion LPCVD Ni silicidation Ni(Pt)Si RTCVD
spellingShingle	Layer inversion LPCVD Ni silicidation Ni(Pt)Si RTCVD Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. See, A. Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
description	10.1016/S0167-9317(01)00592-5
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. See, A.
format	Conference or Workshop Item
author	Lee, P.S. Mangelinck, D. Pey, K.L. Ding, J. Chi, D.Z. Osipowicz, T. Dai, J.Y. See, A.
author_sort	Lee, P.S.
title	Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
title_short	Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
title_full	Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
title_fullStr	Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
title_full_unstemmed	Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack
title_sort	enhanced stability of ni monosilicide on mosfets poly-si gate stack
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83704
_version_	1781784383914508288

Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stack

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