Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees

Materials Research Society Symposium - Proceedings

Saved in:

Bibliographic Details
Main Authors:	Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K., Chang, C.W., Guo, Q.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83713
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-83713
record_format	dspace
spelling	sg-nus-scholar.10635-837132015-01-08T00:49:08Z Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q. ELECTRICAL & COMPUTER ENGINEERING Materials Research Society Symposium - Proceedings 766 121-126 MRSPD 2014-10-07T04:44:20Z 2014-10-07T04:44:20Z 2003 Conference Paper Gan, C.L.,Thompson, C.V.,Pey, K.L.,Choi, W.K.,Chang, C.W.,Guo, Q. (2003). Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees. Materials Research Society Symposium - Proceedings 766 : 121-126. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83713 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Materials Research Society Symposium - Proceedings
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q.
format	Conference or Workshop Item
author	Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q.
spellingShingle	Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q. Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
author_sort	Gan, C.L.
title	Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
title_short	Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
title_full	Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
title_fullStr	Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
title_full_unstemmed	Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
title_sort	experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83713
_version_	1681089486568554496

Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees

Similar Items