Laminated metal gate electrode with tunable work function for advanced CMOS

Digest of Technical Papers - Symposium on VLSI Technology

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Main Authors: Bae, S.H., Bai, W.P., Wen, H.C., Mathew, S., Bera, L.K., Balasubramanian, N., Yamada, N., Li, M.F., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83880
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-838802015-01-09T06:57:58Z Laminated metal gate electrode with tunable work function for advanced CMOS Bae, S.H. Bai, W.P. Wen, H.C. Mathew, S. Bera, L.K. Balasubramanian, N. Yamada, N. Li, M.F. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING Digest of Technical Papers - Symposium on VLSI Technology 188-189 DTPTE 2014-10-07T04:46:15Z 2014-10-07T04:46:15Z 2004 Conference Paper Bae, S.H.,Bai, W.P.,Wen, H.C.,Mathew, S.,Bera, L.K.,Balasubramanian, N.,Yamada, N.,Li, M.F.,Kwong, D.L. (2004). Laminated metal gate electrode with tunable work function for advanced CMOS. Digest of Technical Papers - Symposium on VLSI Technology : 188-189. ScholarBank@NUS Repository. 07431562 http://scholarbank.nus.edu.sg/handle/10635/83880 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Digest of Technical Papers - Symposium on VLSI Technology
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Bae, S.H.
Bai, W.P.
Wen, H.C.
Mathew, S.
Bera, L.K.
Balasubramanian, N.
Yamada, N.
Li, M.F.
Kwong, D.L.
format Conference or Workshop Item
author Bae, S.H.
Bai, W.P.
Wen, H.C.
Mathew, S.
Bera, L.K.
Balasubramanian, N.
Yamada, N.
Li, M.F.
Kwong, D.L.
spellingShingle Bae, S.H.
Bai, W.P.
Wen, H.C.
Mathew, S.
Bera, L.K.
Balasubramanian, N.
Yamada, N.
Li, M.F.
Kwong, D.L.
Laminated metal gate electrode with tunable work function for advanced CMOS
author_sort Bae, S.H.
title Laminated metal gate electrode with tunable work function for advanced CMOS
title_short Laminated metal gate electrode with tunable work function for advanced CMOS
title_full Laminated metal gate electrode with tunable work function for advanced CMOS
title_fullStr Laminated metal gate electrode with tunable work function for advanced CMOS
title_full_unstemmed Laminated metal gate electrode with tunable work function for advanced CMOS
title_sort laminated metal gate electrode with tunable work function for advanced cmos
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83880
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