Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing

10.1109/IEDM.2007.4419038

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Bibliographic Details
Main Authors:	Lee, R.T.-P., Koh, A.T.-Y., Liu, F.-Y., Fang, W.-W., Liow, T.-Y., Tan, K.-M., Lim, P.-C., Lim, A.E.-J., Zhu, M., Hoe, K.-M., Tung, C.-H., Lo, G.-Q., Wang, X., Low, D.K.-Y., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84151
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84151
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spelling	sg-nus-scholar.10635-841512024-11-11T18:19:43Z Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing Lee, R.T.-P. Koh, A.T.-Y. Liu, F.-Y. Fang, W.-W. Liow, T.-Y. Tan, K.-M. Lim, P.-C. Lim, A.E.-J. Zhu, M. Hoe, K.-M. Tung, C.-H. Lo, G.-Q. Wang, X. Low, D.K.-Y. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE 10.1109/IEDM.2007.4419038 Technical Digest - International Electron Devices Meeting, IEDM 685-688 TDIMD 2014-10-07T04:49:23Z 2014-10-07T04:49:23Z 2007 Conference Paper Lee, R.T.-P., Koh, A.T.-Y., Liu, F.-Y., Fang, W.-W., Liow, T.-Y., Tan, K.-M., Lim, P.-C., Lim, A.E.-J., Zhu, M., Hoe, K.-M., Tung, C.-H., Lo, G.-Q., Wang, X., Low, D.K.-Y., Samudra, G.S., Chi, D.-Z., Yeo, Y.-C. (2007). Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing. Technical Digest - International Electron Devices Meeting, IEDM : 685-688. ScholarBank@NUS Repository. https://doi.org/10.1109/IEDM.2007.4419038 01631918 http://scholarbank.nus.edu.sg/handle/10635/84151 000259347800156 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/IEDM.2007.4419038
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lee, R.T.-P. Koh, A.T.-Y. Liu, F.-Y. Fang, W.-W. Liow, T.-Y. Tan, K.-M. Lim, P.-C. Lim, A.E.-J. Zhu, M. Hoe, K.-M. Tung, C.-H. Lo, G.-Q. Wang, X. Low, D.K.-Y. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C.
format	Conference or Workshop Item
author	Lee, R.T.-P. Koh, A.T.-Y. Liu, F.-Y. Fang, W.-W. Liow, T.-Y. Tan, K.-M. Lim, P.-C. Lim, A.E.-J. Zhu, M. Hoe, K.-M. Tung, C.-H. Lo, G.-Q. Wang, X. Low, D.K.-Y. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C.
spellingShingle	Lee, R.T.-P. Koh, A.T.-Y. Liu, F.-Y. Fang, W.-W. Liow, T.-Y. Tan, K.-M. Lim, P.-C. Lim, A.E.-J. Zhu, M. Hoe, K.-M. Tung, C.-H. Lo, G.-Q. Wang, X. Low, D.K.-Y. Samudra, G.S. Chi, D.-Z. Yeo, Y.-C. Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
author_sort	Lee, R.T.-P.
title	Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
title_short	Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
title_full	Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
title_fullStr	Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
title_full_unstemmed	Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing
title_sort	route to low parasitic resistance in mugfets with silicon-carbon source/drain: integration of novel low barrier ni(m)si:c metal silicides and pulsed laser annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84151
_version_	1821191423581487104

Route to low parasitic resistance in MuGFETs with silicon-carbon source/drain: Integration of novel low barrier Ni(M)Si:C metal silicides and pulsed laser annealing

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