Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching

Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching

10.1557/opl.2012.1663

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Bibliographic Details
Main Authors: Ho, J.-W., Wee, Q., Dumond, J., Zhang, L., Zang, K., Choi, W.K., Tay, A.A.O., Chua, S.-J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84360
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-843602015-01-08T16:31:21Z Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching Ho, J.-W. Wee, Q. Dumond, J. Zhang, L. Zang, K. Choi, W.K. Tay, A.A.O. Chua, S.-J. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING 10.1557/opl.2012.1663 Materials Research Society Symposium Proceedings 1512 7-13 MRSPD 2014-10-07T04:51:48Z 2014-10-07T04:51:48Z 2012 Conference Paper Ho, J.-W.,Wee, Q.,Dumond, J.,Zhang, L.,Zang, K.,Choi, W.K.,Tay, A.A.O.,Chua, S.-J. (2012). Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching. Materials Research Society Symposium Proceedings 1512 : 7-13. ScholarBank@NUS Repository. <a href="https://doi.org/10.1557/opl.2012.1663" target="_blank">https://doi.org/10.1557/opl.2012.1663</a> 9781632661050 02729172 http://scholarbank.nus.edu.sg/handle/10635/84360 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1557/opl.2012.1663
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ho, J.-W.
Wee, Q.
Dumond, J.
Zhang, L.
Zang, K.
Choi, W.K.
Tay, A.A.O.
Chua, S.-J.
format Conference or Workshop Item
author Ho, J.-W.
Wee, Q.
Dumond, J.
Zhang, L.
Zang, K.
Choi, W.K.
Tay, A.A.O.
Chua, S.-J.
spellingShingle Ho, J.-W.
Wee, Q.
Dumond, J.
Zhang, L.
Zang, K.
Choi, W.K.
Tay, A.A.O.
Chua, S.-J.
Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
author_sort Ho, J.-W.
title Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
title_short Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
title_full Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
title_fullStr Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
title_full_unstemmed Wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
title_sort wafer-scale, highly-ordered silicon nanowires produced by step-and-flash imprint lithography and metal-assisted chemical etching
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84360
_version_ 1681089604232413184

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