Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process

10.1109/ICSICT.2006.306268

Saved in:
Bibliographic Details
Main Authors: Wang, X.P., Li, M.-F., Yu, H.Y., Ren, C., Loh, W.Y., Zhu, C.X., Chin, A., Trigg, A.D., Yeo, Y.-C., Biesemans, S., Lo, G.Q., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84366
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore