$Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process$

Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process

10.1109/ICSICT.2006.306268

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Bibliographic Details
Main Authors:	Wang, X.P., Li, M.-F., Yu, H.Y., Ren, C., Loh, W.Y., Zhu, C.X., Chin, A., Trigg, A.D., Yeo, Y.-C., Biesemans, S., Lo, G.Q., Kwong, D.L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84366
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84366
record_format	dspace
spelling	sg-nus-scholar.10635-843662015-01-05T21:35:27Z Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process Wang, X.P. Li, M.-F. Yu, H.Y. Ren, C. Loh, W.Y. Zhu, C.X. Chin, A. Trigg, A.D. Yeo, Y.-C. Biesemans, S. Lo, G.Q. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ICSICT.2006.306268 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings 424-426 2014-10-07T04:51:51Z 2014-10-07T04:51:51Z 2007 Conference Paper Wang, X.P.,Li, M.-F.,Yu, H.Y.,Ren, C.,Loh, W.Y.,Zhu, C.X.,Chin, A.,Trigg, A.D.,Yeo, Y.-C.,Biesemans, S.,Lo, G.Q.,Kwong, D.L. (2007). Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process. ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings : 424-426. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICSICT.2006.306268" target="_blank">https://doi.org/10.1109/ICSICT.2006.306268</a> 1424401615 http://scholarbank.nus.edu.sg/handle/10635/84366 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/ICSICT.2006.306268
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, X.P. Li, M.-F. Yu, H.Y. Ren, C. Loh, W.Y. Zhu, C.X. Chin, A. Trigg, A.D. Yeo, Y.-C. Biesemans, S. Lo, G.Q. Kwong, D.L.
format	Conference or Workshop Item
author	Wang, X.P. Li, M.-F. Yu, H.Y. Ren, C. Loh, W.Y. Zhu, C.X. Chin, A. Trigg, A.D. Yeo, Y.-C. Biesemans, S. Lo, G.Q. Kwong, D.L.
spellingShingle	Wang, X.P. Li, M.-F. Yu, H.Y. Ren, C. Loh, W.Y. Zhu, C.X. Chin, A. Trigg, A.D. Yeo, Y.-C. Biesemans, S. Lo, G.Q. Kwong, D.L. Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
author_sort	Wang, X.P.
title	Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
title_short	Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
title_full	Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
title_fullStr	Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
title_full_unstemmed	Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
title_sort	work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84366
_version_	1681089605325029376

Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process

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