Measurement of thin film piezoelectric constants using x-ray diffraction technique
10.1088/0031-8949/2007/T129/078
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Main Authors: | Yu, Y.H., Lai, M.O., Lu, L. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/86017 |
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Institution: | National University of Singapore |
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