Thermal stability of Cu/α-Ta/SiO2/Si structures
10.1016/j.tsf.2004.05.057
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2014
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sg-nus-scholar.10635-903772023-10-30T10:23:15Z Thermal stability of Cu/α-Ta/SiO2/Si structures Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. CHEMICAL & BIOMOLECULAR ENGINEERING α-Ta Cu metallization Diffusion barrier SiO2 Thermal stability 10.1016/j.tsf.2004.05.057 Thin Solid Films 462-463 SPEC. ISS. 284-287 THSFA 2014-10-09T07:04:34Z 2014-10-09T07:04:34Z 2004-09 Article Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M. (2004-09). Thermal stability of Cu/α-Ta/SiO2/Si structures. Thin Solid Films 462-463 (SPEC. ISS.) : 284-287. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.057 00406090 http://scholarbank.nus.edu.sg/handle/10635/90377 000223812800058 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
α-Ta Cu metallization Diffusion barrier SiO2 Thermal stability |
| spellingShingle |
α-Ta Cu metallization Diffusion barrier SiO2 Thermal stability Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. Thermal stability of Cu/α-Ta/SiO2/Si structures |
| description |
10.1016/j.tsf.2004.05.057 |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. |
| format |
Article |
| author |
Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. |
| author_sort |
Yuan, Z.L. |
| title |
Thermal stability of Cu/α-Ta/SiO2/Si structures |
| title_short |
Thermal stability of Cu/α-Ta/SiO2/Si structures |
| title_full |
Thermal stability of Cu/α-Ta/SiO2/Si structures |
| title_fullStr |
Thermal stability of Cu/α-Ta/SiO2/Si structures |
| title_full_unstemmed |
Thermal stability of Cu/α-Ta/SiO2/Si structures |
| title_sort |
thermal stability of cu/α-ta/sio2/si structures |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/90377 |
| _version_ |
1781785520167190528 |