Thermal stability of Cu/α-Ta/SiO2/Si structures

Thermal stability of Cu/α-Ta/SiO2/Si structures

10.1016/j.tsf.2004.05.057

Saved in:

書目詳細資料
Main Authors:	Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M.
其他作者:	CHEMICAL & BIOMOLECULAR ENGINEERING
格式:	Article
出版:	2014
主題:	α-Ta Cu metallization Diffusion barrier SiO2 Thermal stability
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/90377
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

相似書籍

Study of interactions between α-Ta films and SiO2 under rapid thermal annealing
由: Yuan, Z.L., et al.
出版: (2014)

Interfacial reactions and failure mechanism of Cu/Ta/SiO2/Si multilayer structure in thermal annealing
由: Latt, K.M., et al.
出版: (2014)

The decomposition mechanism of SiO2 with the deposition of oxygen-deficient M(Hf or Zr)Ox films
由: Li, Q., et al.
出版: (2014)

The impact of layer thickness of IMP-deposited tantalum nitride films on integrity of Cu/TaN/SiO2/Si multilayer structure
由: Latt, K.M., et al.
出版: (2014)

A study of Cu-Mn/SiO2 catalysts for methanol synthesis
由: Li, J.-T., et al.
出版: (2014)

Characterization of Cu/Ta/ultra low-k porous polymer structures for multilevel interconnects
由: Yang, L.Y., et al.
出版: (2014)

Thermal stability of Cu/Ta/ultra low k porous polymer structures for multilevel interconnects
由: Zhang, D.H., et al.
出版: (2014)

Performance and microstructure of MgO-SiO2 concrete under different environments
由: Sonat, Cem, et al.
出版: (2020)

Electrochemical deposition of copper on patterned Cu/Ta(N)/SiO2 surfaces for super filling of sub-micron features
由: Li, W.H., et al.
出版: (2014)

Comparative study of Ta and TaN(N) in the barrier/ultra low k structures for deep submicron integrated circuits
由: Yang, L.Y., et al.
出版: (2014)

Comparative investigation of TaN and SiCN barrier layer for Cu/ultra low k integration
由: Yang, L.Y., et al.
出版: (2014)

Adhesion Mechanism of Different Alkyltrichlorosilanes Enhanced Superhydrophobicity on Superhydrophilic SiO2 Film Prepared by Dip Coating
由: Atchara Sriboonruang, et al.
出版: (2020)

Broadband absorption tailoring of SiO2/Cu/ITO arrays based on hybrid coupled resonance mode
由: Lian, Jiqing, et al.
出版: (2019)

Effect of the silicon nitride passivation layer on the Cu/Ta/SiO2/Si multi-layer structure
由: Latt, K.M., et al.
出版: (2014)

Physical and electrical characterization of metal-insulator-metal capacitors with Sm2O3 and Sm2 O3/SiO2 laminated dielectrics for analog circuit applications
由: Chen, J.-D., et al.
出版: (2014)

Fabrication and characterization of granular Co-SiO2 films and devices
由: ZHAO QIANG
出版: (2010)

Porous SiO2 anti-reflective coatings on large-area substrates by electrospinning and their application to solar modules
由: Raut, H.K., et al.
出版: (2014)

Investigation of Pressure Effect on Structure of 3Al2O3.2SiO2 System
由: Pham, Tri Dung, et al.
出版: (2020)

Modeling the negative quadratic VCC of SiO2 in MIM capacitor
由: Phung, T.H., et al.
出版: (2014)

An active and stable Wilkinson's complex-derived SiO 2-tethered catalyst via an amine ligand for cyclohexene hydroformylation
由: Huang, L., et al.
出版: (2014)

Properties of electroplated copper thin film and its interfacial reactions in the EPCu/IMPCu/IMPTaN/SiO2/Si multilayer structure
由: Latt, K.M., et al.
出版: (2014)

A preliminary study on the preparation of nanostructured Ti-doped Li4SiO4 pebbles by two-step sintering process
由: Gong, Yichao, et al.
出版: (2020)

Investigation on structure of TeO2-B2O3-SiO2-Al2O3-KF glasses
由: Phan, Van Do
出版: (2020)

Effective modulation of quadratic voltage coefficient of capacitance in MIM capacitors using Sm2O3SiO2 dielectric stack
由: Yang, J.-J., et al.
出版: (2014)

The use of sample rotation in SIMS profiling of Ta barrier layers to Cu diffusion
由: Liu, R., et al.
出版: (2014)

Magnetic properties and microstructure of FePt-SiO2 nanocomposite films fabricated by nanocluster beam technology
由: Tan, C.Y., et al.
出版: (2014)

Synthesis of Au-SiO2 asymmetric clusters and their application in ZnO nanosheet-based dye-sensitized solar cells
由: Li, H., et al.
出版: (2014)

Study of copper diffusion into Ta and TaN barrier materials for MOS devices
由: Loh, S.W., et al.
出版: (2014)

Integration of high-κ dielectrics and metal gate on gate-all-around si-nanowire-based architecture for high-speed nonvolatile charge-trapping memory
由: Fu, J., et al.
出版: (2014)

Development of low mass-transfer-resistance fluorinated TiO2-SiO2/PVDF composite hollow fiber membrane used for biogas upgrading in gas-liquid membrane contactor
由: Xu, Yilin, et al.
出版: (2019)

Synthesis and investigation of Al2O3/SiO 2/ZrO2 powders for biological and medical application
由: Wang, W., et al.
出版: (2014)

DEVELOPMENT OF SIO2 SUPPORTED NICKEL BASED CATALYSTS BY COMPLEXATION WITH ORGANIC MOLECULES FOR CO2 REFORMING OF CH4
由: GAO XINGYUAN
出版: (2016)

Numerical and experimental study of fluorescence enhancement with silica encapsulated metallic nanoparticles
由: Zhang, J.B., et al.
出版: (2014)

A comparative study of HfTaON/SiO2 and HfON/SiO2 gate stacks with TaN metal gate for advanced CMOS applications
由: Yu, X., et al.
出版: (2014)

Thermally robust TaTbxN metal gate electrode for n-MOSFETs applications
由: Ren, C., et al.
出版: (2014)

An active and stable RhH(CO)(PPh3)3-derived SiO2-tethered catalyst via a thiol ligand for cyclohexene hydroformylation
由: Huang, L., et al.
出版: (2014)

Fermi-Level Pinning Induced Thermal Instability in the Effective Work Function of TaN in TaN/SiO 2 Gate Stack
由: Ren, C., et al.
出版: (2014)

Sol-gel derived thin films of LiTaO3 on SiO2/Si substrates for optical waveguide applications
由: Cheng, S.-D., et al.
出版: (2014)

Effects of Cu:Al ratios and SiO2 substrates on PE-MOCVD copper aluminium oxide semiconductor thin films
由: CAI JIANLING
出版: (2010)

Nghiên cứu quá trình oxi hóa trực tiếp benzen thành phenol bằng 02 trên xúc tác V-W-Oxit/SiO2
由: Nguyễn, Thị Bích Lộc
出版: (2017)