Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth
Materials Research Society Symposium Proceedings
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2014
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sg-nus-scholar.10635-906212015-01-08T06:31:23Z Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth Mok, K.R.C. Colombeau, B. Jaraiz, M. Castrillo, P. Rubio, J.E. Pinacho, R. Srinivasan, M.P. Benistant, F. Martin-Bragado, I. Hamilton, J.J. CHEMICAL & BIOMOLECULAR ENGINEERING Materials Research Society Symposium Proceedings 912 99-104 MRSPD 2014-10-09T07:07:17Z 2014-10-09T07:07:17Z 2006 Conference Paper Mok, K.R.C.,Colombeau, B.,Jaraiz, M.,Castrillo, P.,Rubio, J.E.,Pinacho, R.,Srinivasan, M.P.,Benistant, F.,Martin-Bragado, I.,Hamilton, J.J. (2006). Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth. Materials Research Society Symposium Proceedings 912 : 99-104. ScholarBank@NUS Repository. 1558998683 02729172 http://scholarbank.nus.edu.sg/handle/10635/90621 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Materials Research Society Symposium Proceedings |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Mok, K.R.C. Colombeau, B. Jaraiz, M. Castrillo, P. Rubio, J.E. Pinacho, R. Srinivasan, M.P. Benistant, F. Martin-Bragado, I. Hamilton, J.J. |
| format |
Conference or Workshop Item |
| author |
Mok, K.R.C. Colombeau, B. Jaraiz, M. Castrillo, P. Rubio, J.E. Pinacho, R. Srinivasan, M.P. Benistant, F. Martin-Bragado, I. Hamilton, J.J. |
| spellingShingle |
Mok, K.R.C. Colombeau, B. Jaraiz, M. Castrillo, P. Rubio, J.E. Pinacho, R. Srinivasan, M.P. Benistant, F. Martin-Bragado, I. Hamilton, J.J. Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| author_sort |
Mok, K.R.C. |
| title |
Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| title_short |
Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| title_full |
Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| title_fullStr |
Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| title_full_unstemmed |
Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth |
| title_sort |
modeling and simulation of the influence of soi structure on damage evolution and ultra-shallow junction formed by ge preamorphization implants and solid phase epitaxial regrowth |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/90621 |
| _version_ |
1681090624831356928 |