Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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Bibliographic Details
Main Authors:	Taijing, Lu, Ng, S.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/95967
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-95967
record_format	dspace
spelling	sg-nus-scholar.10635-959672015-01-12T08:52:29Z Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer Taijing, Lu Ng, S.C. PHYSICS Journal of Materials Research 9 10 2712-2716 JMREE 2014-10-16T09:17:55Z 2014-10-16T09:17:55Z 1994-10 Article Taijing, Lu,Ng, S.C. (1994-10). Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Materials Research 9 (10) : 2712-2716. ScholarBank@NUS Repository. 08842914 http://scholarbank.nus.edu.sg/handle/10635/95967 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Materials Research
author2	PHYSICS
author_facet	PHYSICS Taijing, Lu Ng, S.C.
format	Article
author	Taijing, Lu Ng, S.C.
spellingShingle	Taijing, Lu Ng, S.C. Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
author_sort	Taijing, Lu
title	Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_short	Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full	Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_fullStr	Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_full_unstemmed	Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
title_sort	characterization of striations in silicon wafers by a multipass fabry-perot rayleigh-brillouin scattering spectrometer
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/95967
_version_	1681091574197387264

Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

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