Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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Bibliographic Details
Main Authors: Taijing, Lu, Ng, S.C.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/95967
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Institution: National University of Singapore
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