Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Characterization of striations in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer

Journal of Materials Research

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書目詳細資料
Main Authors:	Taijing, Lu, Ng, S.C.
其他作者:	PHYSICS
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/95967
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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