Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

10.1016/S0925-9635(00)00459-3

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Bibliographic Details
Main Authors: Rusli, H., Yoon, S.F., Huang, Q.F., Ahn, J., Zhang, Q., Yang, H., Wu, Y.S., Teo, E.J., Osipowicz, T., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
CVD
DLC
Electrical
Optical
Online Access:http://scholarbank.nus.edu.sg/handle/10635/97180
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Institution: National University of Singapore
Description
Summary:10.1016/S0925-9635(00)00459-3

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