Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

• Main Authors: Rusli, H., Yoon, S.F., Huang, Q.F., Ahn, J., Zhang, Q., Yang, H., Wu, Y.S., Teo, E.J., Osipowicz, T., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: CVD; DLC; Electrical; Optical
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/97180
• Institution: National University of Singapore

10.1016/S0925-9635(00)00459-3