Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

10.1016/S0925-9635(00)00459-3

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Bibliographic Details
Main Authors:	Rusli, H., Yoon, S.F., Huang, Q.F., Ahn, J., Zhang, Q., Yang, H., Wu, Y.S., Teo, E.J., Osipowicz, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	CVD DLC Electrical Optical
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/97180
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-97180
record_format	dspace
spelling	sg-nus-scholar.10635-971802024-11-14T01:01:20Z Metal-containing amorphous carbon film development using electron cyclotron resonance CVD Rusli, H. Yoon, S.F. Huang, Q.F. Ahn, J. Zhang, Q. Yang, H. Wu, Y.S. Teo, E.J. Osipowicz, T. Watt, F. PHYSICS CVD DLC Electrical Optical 10.1016/S0925-9635(00)00459-3 Diamond and Related Materials 10 2 132-138 DRMTE 2014-10-16T09:32:13Z 2014-10-16T09:32:13Z 2001-02 Article Rusli, H.,Yoon, S.F.,Huang, Q.F.,Ahn, J.,Zhang, Q.,Yang, H.,Wu, Y.S.,Teo, E.J.,Osipowicz, T.,Watt, F. (2001-02). Metal-containing amorphous carbon film development using electron cyclotron resonance CVD. Diamond and Related Materials 10 (2) : 132-138. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/S0925-9635(00)00459-3" target="_blank">https://doi.org/10.1016/S0925-9635(00)00459-3</a> 09259635 http://scholarbank.nus.edu.sg/handle/10635/97180 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CVD DLC Electrical Optical
spellingShingle	CVD DLC Electrical Optical Rusli, H. Yoon, S.F. Huang, Q.F. Ahn, J. Zhang, Q. Yang, H. Wu, Y.S. Teo, E.J. Osipowicz, T. Watt, F. Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
description	10.1016/S0925-9635(00)00459-3
author2	PHYSICS
author_facet	PHYSICS Rusli, H. Yoon, S.F. Huang, Q.F. Ahn, J. Zhang, Q. Yang, H. Wu, Y.S. Teo, E.J. Osipowicz, T. Watt, F.
format	Article
author	Rusli, H. Yoon, S.F. Huang, Q.F. Ahn, J. Zhang, Q. Yang, H. Wu, Y.S. Teo, E.J. Osipowicz, T. Watt, F.
author_sort	Rusli, H.
title	Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
title_short	Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
title_full	Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
title_fullStr	Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
title_full_unstemmed	Metal-containing amorphous carbon film development using electron cyclotron resonance CVD
title_sort	metal-containing amorphous carbon film development using electron cyclotron resonance cvd
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/97180
_version_	1821224739917529088

Metal-containing amorphous carbon film development using electron cyclotron resonance CVD

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