Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure
10.1016/S1369-8001(00)00031-7
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2014
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sg-nus-scholar.10635-980852023-10-29T22:23:09Z Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure Lee, Y.K. Latt, K.M. Osipowicz, T. Sher-Yi, C. PHYSICS 10.1016/S1369-8001(00)00031-7 Materials Science in Semiconductor Processing 3 3 191-194 MSSPF 2014-10-16T09:42:48Z 2014-10-16T09:42:48Z 2000-06 Article Lee, Y.K., Latt, K.M., Osipowicz, T., Sher-Yi, C. (2000-06). Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure. Materials Science in Semiconductor Processing 3 (3) : 191-194. ScholarBank@NUS Repository. https://doi.org/10.1016/S1369-8001(00)00031-7 13698001 http://scholarbank.nus.edu.sg/handle/10635/98085 000165549600005 Scopus |
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10.1016/S1369-8001(00)00031-7 |
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PHYSICS |
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PHYSICS Lee, Y.K. Latt, K.M. Osipowicz, T. Sher-Yi, C. |
| format |
Article |
| author |
Lee, Y.K. Latt, K.M. Osipowicz, T. Sher-Yi, C. |
| spellingShingle |
Lee, Y.K. Latt, K.M. Osipowicz, T. Sher-Yi, C. Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| author_sort |
Lee, Y.K. |
| title |
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| title_short |
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| title_full |
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| title_fullStr |
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| title_full_unstemmed |
Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure |
| title_sort |
study of diffusion barrier properties of ternary alloy (tixalynz) in cu/tixalynz/sio2/si thin film structure |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98085 |
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1781786803838124032 |