Approach to interface roughness of silicide thin films by micro-Raman imaging
10.1116/1.1868646
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2014
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sg-nus-scholar.10635-986382023-10-29T21:04:56Z Approach to interface roughness of silicide thin films by micro-Raman imaging Zhao, F.F. Sun, W.X. Feng, Y.P. Zheng, J.Z. Shen, Z.X. Pang, C.H. Chan, L.H. PHYSICS 10.1116/1.1868646 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2 468-474 JVTBD 2014-10-16T09:49:36Z 2014-10-16T09:49:36Z 2005 Conference Paper Zhao, F.F., Sun, W.X., Feng, Y.P., Zheng, J.Z., Shen, Z.X., Pang, C.H., Chan, L.H. (2005). Approach to interface roughness of silicide thin films by micro-Raman imaging. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2) : 468-474. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1868646 10711023 http://scholarbank.nus.edu.sg/handle/10635/98638 000228788600021 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
10.1116/1.1868646 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Zhao, F.F. Sun, W.X. Feng, Y.P. Zheng, J.Z. Shen, Z.X. Pang, C.H. Chan, L.H. |
| format |
Conference or Workshop Item |
| author |
Zhao, F.F. Sun, W.X. Feng, Y.P. Zheng, J.Z. Shen, Z.X. Pang, C.H. Chan, L.H. |
| spellingShingle |
Zhao, F.F. Sun, W.X. Feng, Y.P. Zheng, J.Z. Shen, Z.X. Pang, C.H. Chan, L.H. Approach to interface roughness of silicide thin films by micro-Raman imaging |
| author_sort |
Zhao, F.F. |
| title |
Approach to interface roughness of silicide thin films by micro-Raman imaging |
| title_short |
Approach to interface roughness of silicide thin films by micro-Raman imaging |
| title_full |
Approach to interface roughness of silicide thin films by micro-Raman imaging |
| title_fullStr |
Approach to interface roughness of silicide thin films by micro-Raman imaging |
| title_full_unstemmed |
Approach to interface roughness of silicide thin films by micro-Raman imaging |
| title_sort |
approach to interface roughness of silicide thin films by micro-raman imaging |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98638 |
| _version_ |
1781786921655074816 |