Approach to interface roughness of silicide thin films by micro-Raman imaging

10.1116/1.1868646

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Bibliographic Details
Main Authors:	Zhao, F.F., Sun, W.X., Feng, Y.P., Zheng, J.Z., Shen, Z.X., Pang, C.H., Chan, L.H.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98638
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Institution:	National University of Singapore

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