Approach to interface roughness of silicide thin films by micro-Raman imaging
10.1116/1.1868646
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Main Authors: | Zhao, F.F., Sun, W.X., Feng, Y.P., Zheng, J.Z., Shen, Z.X., Pang, C.H., Chan, L.H. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/98638 |
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Institution: | National University of Singapore |
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